文章摘要
刘合伟,钱梦騄.激光干涉法测量微小振动[J].声学技术,2001,(2):75~77
激光干涉法测量微小振动
Measurement of small vibration by laser interferometer
投稿时间:2000-03-27  修订日期:2000-07-06
DOI:
中文关键词: 激光干涉  测振  微驱动器
英文关键词: laser interferometer  measurement of vibration  tiny driver
基金项目:自然科学基金资助
作者单位
刘合伟 同济大学声学研究所, 上海 200092 
钱梦騄 同济大学声学研究所, 上海 200092 
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中文摘要:
      文章介绍用激光干涉法测量新型压电微驱动器动态位移响应的实验原理及方法。实验结果表明,这类PZNPZT微驱动器不仅具有高的电压位移灵敏度,而且其频响可高达1kHz,是一种很好的微驱动器件
英文摘要:
      The theory and experimental method of measuring a small vibrating displacement by laser interferometer are introduced in the paper.And the experimental results of dynamic response displacement of a new kind of tiny piezoelectric driver are obtained.The results show that the kind of PZN-PZT tiny driver not only has high voltage displacement sensitivity,but also it is frequency response approaches 1kHz,so it's one very good kind of tiny driver.
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